A recent advance in nanotechnology could herald the widespread uptake of nanoelectrode arrays and the next generation of low-cost, high-performance nanoscale biosensing devices An interdisciplinary ...
In principle, the highest resolution in each case is obtained with the shortest wavelengths — X-rays or γ-rays. In microscopy and microlithography, the spatial resolution of the optical system ...
As early adopters of 90- and 65-nm processes have learned, there's a big difference between what you design at these nodes and what gets printed on the wafer. The fact that these microscopic ...
Erlangen, Germany / San José, USA | Dr. Andreas Erdmann, head of the Computational Lithography and Optics group at Fraunhofer IISB for decades and SPIE (International Society for Optics and Photonics) ...